About: http://webisa.webdatacommons.org/276407203

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The method of claim 27, wherein the substrate support includes a heater, the method including maintaining the substrate at a desired temperature by heating the substrate support with the heater.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr