About: http://webisa.webdatacommons.org/276422284

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Thereafter, any damage caused to the substrate 200 in the step of formation of the first trench 206 is sufficiently recovered or eliminated by a suitable method such as annealing or wet etching.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com