About: http://webisa.webdatacommons.org/276432776

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The third MUSIC photoresist element 607 may be formed along a bottom surface 610 of the MUSIC photoresist 601 and may have a thickness of between about 5 nm and about 60 nm, such as about 40 nm.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com