About: http://webisa.webdatacommons.org/276503842

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The seventh and eighth interlayer insulating films 510 and 520 can be formed of, for example, a plurality of films including an insulating film with a relative permittivity of not more than 4.0.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr