About: http://webisa.webdatacommons.org/276538865

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The susceptor 32A is formed as a disk-shaped member made of a ceramic material such as AlN, Al2O3, SiC or SiO2.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com