| http://www.w3.org/ns/prov#value | - BRIEF DESCRIPTION OF THE DRAWINGS [0008]FIG. 1 is a schematic cross sectional view of a doping device according to the first embodiment of the present invention. [0009]FIG. 2 is a graph showing an emission intensity versus boron concentration relationship. [0010]FIG. 3 is a graph showing a high frequency voltage versus boron concentration relationship. [0011]FIG. 4 is a schematic vertical cross se
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