| http://www.w3.org/ns/prov#value | - The process parameters are similar to those shown by Table 4, but for the power range being between about 60 W to about 450 W, for example, between about 250 W and about 350 W. For the implementation of pulsed plasma, the RF power can be pulsed at about 500 to 5,000 Hz, for example 1,000 Hz to about 1,250 Hz, using, for example, a square wave pulse sequence.
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