About: http://webisa.webdatacommons.org/276727380

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The apparatus of claim 19 wherein said substrate is a semiconductor material selected from the group consisting of Si, Ge, Ga, SiGe, GaAs, InP, InAs, and other III/V compound semiconductors. 21.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com