About: http://webisa.webdatacommons.org/276908813

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	These MEMS (microelectromechanical systems) devices can include parts such as gears, mirrors, and drive chains.
http://www.w3.org/ns/prov#wasQuotedFrom	aps.org