About: http://webisa.webdatacommons.org/277194818

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In addition, an effective dielectric constant of the insulating film existing between interconnects can be reduced because an insulating film, such as a silicon nitride film, is not used as the capping conductive film.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com