About: http://webisa.webdatacommons.org/277228657

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In another embodiment, cleaning such as sputter cleaning is accomplished in an inter gas plasma to remove native oxides and impurities.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com