About: http://webisa.webdatacommons.org/277230139

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In this case, the metal plugs 15 d and 15 c are not always projected from the back surface of the substrate, and the back surface of the substrate including the metal plugs 15 d and 15 c may be merely made flat by CMP.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au