About: http://webisa.webdatacommons.org/277325368

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	An oxide such as silicon oxide is deposited to form a conformal oxide layer 53 on gate electrodes 52 a, 52 b, 52 c and on substrate 40.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com