About: http://webisa.webdatacommons.org/277391862

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Another temperature control problem occurs for chamber walls composed of ceramics such as silicon, B4 C or BN, which have a relatively low thermal shock resistance and can crack when subjected to high thermal stresses.
http://www.w3.org/ns/prov#wasQuotedFrom	google.co.uk