| http://www.w3.org/ns/prov#value | - In the case of a mask, the support structure will generally be a mask table, which ensures that the mask can be held at a desired position in the incoming radiation beam, and that it can be moved relative to the beam if so desired; a programmable mirror array: one example of such a device is a matrix-addressable surface having a visco-elastic control layer and a reflective surface.
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