About: http://webisa.webdatacommons.org/277611855

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Mechanical devices such as gears or springs are made by alternately depositing a film, then using chemicals to etch out the pattern, a process known as photolithography.
http://www.w3.org/ns/prov#wasQuotedFrom	electroiq.com