About: http://webisa.webdatacommons.org/277874435

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	BACKGROUND ART [0002] Recently, a silicon single crystal wafer is mainly used as a wafer for fabricating a device such as a semiconductor integrated circuit or the like.
http://www.w3.org/ns/prov#wasQuotedFrom	google.ca