About: http://webisa.webdatacommons.org/278009924

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Hence, an object of the present invention is an improved etching apparatus and method.
http://www.w3.org/ns/prov#wasQuotedFrom	google.de