About: http://webisa.webdatacommons.org/278089353

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Additionally, amorphous carbon is found to be a particularly advantageous material in having a high etching selectivity with respect to typical photoresists.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com