About: http://webisa.webdatacommons.org/278146755

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	gher drive current and capacitance, compared to a film not annealed in ammonia. [0020] The present invention has been particularly shown and described with respect to certain preferred embodiments of features thereof.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es