About: http://webisa.webdatacommons.org/278607374

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	At first we create a very-high vacuum inside these chambers, then we deposit beams of selected kinds of elements in a very controlled way in order to deposit a layer of material that is the thickness of only one atom, Samarth said.
http://www.w3.org/ns/prov#wasQuotedFrom	phys.org