| http://www.w3.org/ns/prov#value | - Further, a step of forming the side wall 10 can be omitted. [0105] Modifications. [0106] While the noble metal employed for the lower electrode film 6 and the upper electrode film 9 is platinum or ruthenium in each of the embodiments 1 to 3, still another noble metal such as iridium, palladium or the like is also employable.
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