About: http://webisa.webdatacommons.org/278617700

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Other materials, such as sapphire, that have a hardness greater than the slurry or other polishing material used with the pad to be conditioned, may also be used to form the layer 404 and included surface 405 for other embodiments.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com