About: http://webisa.webdatacommons.org/278697172

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	It is required in the semiconductor light-emitting element 20 depicted in FIG. 1 that the full width at half maximum (FWHM) in X-ray rocking curve of the underlayer 2 is set to 90 seconds or below, particularly 50 seconds or below.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com