About: http://webisa.webdatacommons.org/278960893

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	If it were desirable for the hafnium oxide film to also contain another material, such as silicon, there would also be an additional source of that material added to apparatus 40.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com