About: http://webisa.webdatacommons.org/279046597

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	To be more specific, a metal layer such as Ti and W are deposited on the insulating layer 16 by sputtering, vacuum evaporation, or CVD, etc.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com