PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • To strip the photoresist film, there are wet treatment methods in which chemicals, such as hydrogen peroxide or organic solvents, are used; and dry treatment methods in which the photoresist film is ashed by using a plasma.
http://www.w3.org/ns/prov#wasQuotedFrom
  • google.com