About: http://webisa.webdatacommons.org/279234033

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	However, low-k dielectric materials, especially carbon containing low-k dielectric materials, can be sensitive to this type of process step.
http://www.w3.org/ns/prov#wasQuotedFrom	google.ca