About: http://webisa.webdatacommons.org/279576923

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	However, the exposure condition is a condition determined by the exposure tool used in the process of forming a pattern on a semiconductor wafer and is not a condition that can be set freely in designing a phase shift mask.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com