About: http://webisa.webdatacommons.org/279580367

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Now it is assumed that at the side wall of the insulating film 16, 19, the photoresist should have a thickness of at least 3 ??m, a thickness of the photoresist at the bottom of the step would become thick such as 8-10 ??m.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com