About: http://webisa.webdatacommons.org/280470868

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Besides the example described above, it is possible according to the present invention to carry out processing such as CVD, cleaning, etc. at a high speed.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com