| http://www.w3.org/ns/prov#value | - The ashing apparatus comprises a hermetically sealable chamber 111 having a lower chamber 111 a and upper chamber 111 b, a susceptor 112 on which a wafer W is placed, a heater 113 provided in the susceptor 112 to heat the wafer W, a gas supply system, not shown, for supplying a process gas such as oxygen, and an evacuation apparatus for evacuating the interior of the chamber 111.
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