About: http://webisa.webdatacommons.org/28099040

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Specifically, by a plasma CVD method, a sputtering method, or the like, either a single layer or a stacked layer of a film containing an inorganic material such as silicon, silicon oxide, silicon nitride, or the like is formed.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com