About: http://webisa.webdatacommons.org/281092598

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The wafer 210 is spun and coating material, such as photoresist or developer, is dispensed onto the top surface 212 of the wafer 210.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au