About: http://webisa.webdatacommons.org/281124633

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Therefore, what is need is a system and method that reduce ghosting effects when a microlens array is utilized in a lithography tool.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com