About: http://webisa.webdatacommons.org/281135698

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The present invention is a method of forming an improved ILD layer which minimizes void formation in an underlying interconnect line.
http://www.w3.org/ns/prov#wasQuotedFrom	google.ca