http://www.w3.org/ns/prov#value | - The control gate electrode layers 272, 282, and 292 are preferably formed from a metal selected from among tantalum (Ta), tungsten (W), titanium (Ti), molybdenum (Mo), chromium (Cr), niobium (Nb), and the like, or an alloy material or a compound material containing such a metal as a main component.
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