About: http://webisa.webdatacommons.org/281314325

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The present invention is a method for nondestructively determining the topographical cross-section of lines on a substrate which provides line thickness, line width, and the shape of the line edge (the line profile).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com