About: http://webisa.webdatacommons.org/281352597

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The cantilever piezoelectric actuator has been used for obtaining and controlling ultra-fine driving force such as driving force of an atomic force microscope (AFM), a nano drive actuator, a MEMS structure and so on.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com