About: http://webisa.webdatacommons.org/281408526

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The temperature controlled gases delivered to the processing chamber 106 may be a process gas, purge gas, cleaning gas, or other gas.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com