About: http://webisa.webdatacommons.org/281482716

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The two process chambers 1 and 2 include one or several, such as the case is here, gas generators such as 4 and 5 being disposed in process chamber 1, there being gas generators 6 and 7 disposed in process chamber 2.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com