About: http://webisa.webdatacommons.org/281486635

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The insulating layer 12 is formed using an insulating material such as silicon oxide, silicon nitride, or silicon containing oxygen and nitrogen (silicon oxynitride) by a CVD method, a sputtering method, or the like.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com