About: http://webisa.webdatacommons.org/281491314

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The HEMT of claim 1, wherein the layer including AlN comprises an aluminum gallium nitride (AlGaN) layer having a high mole-fraction.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com