About: http://webisa.webdatacommons.org/281607434

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The additional silicon dioxide material used to form the silicon dioxide layer 64 is provided using any suitable means, such as CVD, including LPCVD and PECVD, dry oxidation, wet oxidation or rapid thermal oxidation.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr