About: http://webisa.webdatacommons.org/282163753

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	However, there is a problem in that a part of the source region 2 may be removed by excessive etching when removing a part of the insulator film 10 in the step in FIG. 2(E).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com