About: http://webisa.webdatacommons.org/28226495

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	It is possible that the opening shown is a via opening in which instance there may be an underlying metallization layer (shown by dotted line 54 in FIG. 11 ).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com