About: http://webisa.webdatacommons.org/282281307

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Most of the process are the same as with the first embodiment of the present invention except the steps of separating the polysilicon layer 20 and forming the contact holes.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com