About: http://webisa.webdatacommons.org/282449723

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	As shown in FIG. 5F, on the sensor unit 28, a lead film (W, Ta, or other metals) of a high conductivity is formed for the electrodes of the sensor unit 28.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com