About: http://webisa.webdatacommons.org/282511083

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	As detailed above, the following points were a hindrance to size reduction and weight reduction of an apparatus for observing large samples such as wafers.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com