About: http://webisa.webdatacommons.org/282920302

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Gas such as ozone, passes through the hollow fiber walls and is dissolved in the liquid such as water to form an aqueous ozone solution that can be utilized as an etchant.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com